The MicroProf® 200 available from FRT is a sophisticated, stand-alone measurement tool. It is the most sought-after FRT device and enables non-destructive and contact-free characterization of almost all layers and surfaces.
Thanks to its sturdy design and extremely reliable and durable components, the MicroProf® 200 is perfect for continuous deployment in all industrial environments.
Equipped with a wide portfolio of optional extensions and customizable multi-sensor design, the MicroProf® 200 system solves all existing metrology tasks and is also designed to handle all upcoming challenges. All this comes with easy and intuitive handling.
Highlights of MicroProf® 200
- Individually configurable
- Stand-alone tool
- Industry-standard—several hundred systems have been deployed across the world
- Fully integrated and automated manufacturing device (optional)
- Includes 200 mm x 250 mm measuring range (lateral)
- Provides high throughput with a maximum measuring speed of 300 mm/second
TTV Option
Both the standalone systems and the tabletop tool of the MicroProf® series have the option for two-sided sample review. This allows simultaneous measurement of the bottom and top sides of the sample and also helps determine the thickness of the sample. The sample’s total thickness variation (TTV) can be established together with surface parameters—for example, the flatness, waviness, and roughness of both surfaces. Users can easily retrofit the TTV option on site.
Stand-Alone Measurement Tool with High Throughput