S mart 2—The Only Autonomous Areal Confocal Profilometer

The only autonomous areal confocal profilometer on the market is the S mart 2. It is a breakthrough in the optical field because of its potent features and compact design.

Never before has installing a Sensofar system been so simple; the S mart 2 only requires two single connections, an ethernet cable, and a power source.

S mart 2—The Only Autonomous Areal Confocal Profilometer

Image Credit: Sensofar Metrology

Due to its small width (90 mm), the integrable head can be installed in areas without obstructing users or production processes.

S mart 2—The Only Autonomous Areal Confocal Profilometer

Image Credit: Sensofar Metrology

The S mart 2 has all the electronics, including the computing power, inside the head and was created to be incredibly simple to integrate.

S mart 2—The Only Autonomous Areal Confocal Profilometer

Image Credit: Sensofar Metrology

For a metrological tool to operate correctly, the temperature is essential. A highly effective passive cooling system is the solution to keep the system operational.

S mart 2—The Only Autonomous Areal Confocal Profilometer

Image Credit: Sensofar Metrology

In contrast to point or line confocal chromatics, the S mart 2 areal confocal capability images an area at a time, so the lateral resolution and X and Y remain the same.

S mart 2—The Only Autonomous Areal Confocal Profilometer

Image Credit: Sensofar Metrology

The S Mart 2 includes three technologies to measure in the same head, including AI Focus Variation, Confocal, and Interferometry, to scan with the most appropriate technology.

S mart 2—The Only Autonomous Areal Confocal Profilometer

Image Credit: Sensofar Metrology

S mart 2—The Only Autonomous Areal Confocal Profilometer

Image Credit: Sensofar Metrology

S mart 2—The Only Autonomous Areal Confocal Profilometer

Image Credit: Sensofar Metrology

S mart 2—The Only Autonomous Areal Confocal Profilometer

Image Credit: Sensofar Metrology

Simply concentrate on the surface, and the S mart sensor will handle the rest. The product portfolio for these sensors has been created to meet the automatization needs that are typically present in production lines.

S mart 2—The Only Autonomous Areal Confocal Profilometer

Image Credit: Sensofar Metrology

S mart 2—The Only Autonomous Areal Confocal Profilometer

Image Credit: Sensofar Metrology

The sensor locates the focus, optimizes the light and Z range, and the user receives the result after just one click.

 

Sensofar

Image credit: Sensofar Metrology

 

System Specifications

Table 1. Objective lenses - Brightfield. Source: Sensofar Metrology

MAG 5X 10X 20X 50X
NA 0.15 0.30 0.45 0.80
WD (mm) 23.5 17.5 4.5 1.0
FOV1 (µm) 2820 x 2820 1410 x 1410 700 x 700 280 x 280
Spatial sampling2 (µm) 2.76 1.38 0.69 0.27
Optical resolution3 (µm) 1.11 0.55 0.37 0.21
Measurement noise4 (nm) 90 35 10 4
Maximum slope5 (º) 9 17 27 53

1 Maximum field of view with 2/3” camera and 0.25X optics.
2 Pixel size on the surface.
3 L&S: Line and Space, half of the diffraction limit according to the Rayleigh criterion. Values for blue LED in brightfield objectives.
4 Measurement noise is measured as the difference between two consecutive measurements of a calibration mirror placed perpendicular to the optical axis. Values obtained in a VC-E vibration environment.
5 On smooth surfaces. Up to 86° on rough surfaces. Other objectives are available.

Table 2. Objective lenses - Interferometry. Source Metrology

MAG 10X 20X 50X
NA 0.30 0.40 0.55
WD (mm) 7.4 4.7 3.4
FOV1 (µm) 1410 x 1410 700 x 700 280 x 280
Spatial sampling2 (µm) 1.38 0.69 0.27
Optical resolution3 (µm) 1.38 0.69 0.30
System noise4 (nm) < 5
Maximum slope5 (º) 17 24 33

1 Maximum field of view with 2/3” camera and 0.25X optics.
2 Pixel size on the surface.
3 L&S: Line and Space, half of the diffraction limit according to the Rayleigh criterion. Spatial sampling could limit the optical resolution for interferometric objectives. Values for white LED in interferometric objectives.
4 Measurement noise is measured as the difference between two consecutive measurements of a calibration mirror placed perpendicular to the optical axis. Values obtained in a VC-E vibration environment.
5 On smooth surfaces.

Table 3. Z Performance. Source: Sensofar Metrology

Z LINEAR STAGE
Vertical range 20 mm (0.79″)
Resolution 5 nm

 

S mart 2, the new integrable areal confocal head from Sensofar

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